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electronic grade phosphorus pentafluoride
Molecular formula : PF5
CAS :

nature : at room temperature and atmospheric pressure is colorless, strong smoke gases, with the irritating odor. Extreme hydrolysis, and the role of hydrogen fluoride toxicity and similar. The relative density ds (20 ° C, the air = 1) 4.46. The gas density 5.372kg/m3 (20 ° C, 101.3 kPa); 1636kg/m3 liquid density (-84.5 ° C, saturation pressure). -84.5 ° C boiling point. -93.8 ° C melting point. Five phosphorus fluoride preparation methods are several that can be used phosphorus pentachloride with three fluorinated arsenic reaction; Three or phosphorus fluoride added fluoride, the reaction product by vacuum distillation can be obtained high-purity product. Five phosphorus fluoride in the microelectronics industry as the n-type doping agent.


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Structure:
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More Detailed Data:
1) phosphorus pentafluoride
2) phosphorus pentafluoride
3) Fluoride ion;fluoride;fluoride ion;fluoride ion;fluoride;fluorine ion
4) electron
5) electron
6) phosphorus
7) Phosphorus;phosphorous, yellow;phosphorous ,red
8) fluoride
9) fluoride
10) phosphoruswhite;phosphorusyellow
Notice Some description was translated by software and the data is only as a reference.
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