Original document(10 pages) Authorized document(10 pages) 中文版
    A single crystal pulling apparatus comprising: a gas tight container, a double crucible for storing a semiconductor melt inside the gas tight container comprising an outer crucible and an inner crucible which are connected at a lower edge, and source material supply means for adding source material to the semiconductor melt at a position between the outer crucible and the inner crucible, characterized in that a flow restriction member is provided inside the semiconductor melt region between the outer crucible and the inner crucible for restricting the flow of the semiconductor melt.
Application Number
申请号
97101020 Application Date
申请日
1997.01.10
Title 名称 Single crystal fulling apparatus
Publication Number
公开号
1160779 Publication Date
公开日
1997.10.01
Approval Pub. Date 2004.01.14 Granted Pub. Date 2004.01.14
International Classification 分类号 C30B15/12
Applicant(s) Name
申请人
Mitsubishi Materials Silicon Corp.
Address 地址
Inventor(s) Name 发明人 Takashi Atami;Hiroaki Taguchi;Hisashi Furuya
Attorney & Agent 代理人 MA TIELIANG
More information 更  多  信  息


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