The feature of the present invention consists of incorporating a thermostatic controlling device in the linear motor, moreover, speed measuring feed-back and position sensing control are incorporated and positioning is realized by electromagnetic braking. The linear motor, or a dc micro stepping combination linear motor. The stator and rotor of the linear motor may also serve as guide rail pair of the machine tool, to realize mechanical contact-less magnetically suspended guide rails. Providing thus, one scheme for linear motion mechanism of super precision machining machine tools. |