| Original document(42 pages) 中文版 |
Thermally stable microplastic structures and methods for their manufacture are provided. The microplastic structures are prepared from crosslinkable photosensitive compositions using a specially designed radiation attenuating photomask which permits preselection of the size, length, width and thickness of the desired structure. The microplastic structures are stable at temperatures in excess of 200 DEG C. and can be used as components in miniature electrical, mechanical, chemical and optical devices, such as smart sensors integral to a silicon chip device. |
Application Number
申请号 |
87100180 |
Application Date
申请日 |
1987.01.13 |
| Title 名称 |
Microplastic structures and methods of manufacture |
Publication Number
公开号 |
1012765 |
Publication Date
公开日 |
1987.08.19 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
C08J3/28;C08J7/04;G03F7/016;G03F7/022 |
Applicant(s) Name
申请人 |
Rohm and Haas Co. (US) Independence Mall West, Philadelphia, Pennsylvania, U.S.A |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Wayne Edmund Feely |
| Attorney & Agent 代理人 |
CHEN JIZHUANG LUO YINGMING |
| More information 更 多 信 息 |
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