The sputter of the film through steam by one step method is a brand-new technology. It consists in a reactive sputtering using pure iron (cobalt added) target: Fe to Fe3O4 to gama Fe2O3. Fe3O4 film prepd. by this method has a satd. magnetization intensity Ms up to 450-470 emu/cc, and it is then heated and oxidized to form gama Fe2O3, of which the Ms value may reach 360 emu/cc, and it is then heated and oxidized to form gama Fe2O3, of which the Ms value may reach 360 emu/cc, and the coercive force may reach 300-1300 Oe. The iron oxide film thus prepd. is relatively strong in magnetism, good in tecdhnological stability with large tolerant capacity, high sputtering rate, uniform crystal grain and very few defects. |