Preparation of super-lattice acoustic material and ultrahigh frequency acoustic device

Original document(7 pages) 中文版

Piezoelectric material is grown up on substrate. The piezoelectric material (including LiNbO3, LiTaO3, PbTiO3, BaTiO3, Li3BO7, SiO2, ZnO, PZT, TeO2, Bi12GeO20, and BisTiO4) and non-piezoelectric dielectric material (including MgO, TiO2, SrTiO3 and Al2O3) are selected and MOCVD method is used to grow one-by-one combined acoustic super-lattice material. It is also possible to grow any two piezoelectric materials. The period width is 0.1-3 micrometer and number of periods is 10-100.

Application Number 申请号	93109510	Application Date 申请日	1993.08.07
Title 名称	Preparation of super-lattice acoustic material and ultrahigh frequency acoustic device
Publication Number 公开号	1098823	Publication Date 公开日	1995.02.15
Approval Pub. Date		Granted Pub. Date
International Classification 分类号	C04B35/00,H01L41/16,H01L41/187,H01L41/22
Applicant(s) Name 申请人	Nanjing Univ.
Address 地址	210008
Inventor(s) Name 发明人	Min Naiben
Attorney & Agent 代理人	CHEN JIANHE

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