Original document(21 pages) Authorized document(22 pages) 中文版
    The invention uses multiple beam implantation and dynamic blend technology to solve the difficult problems of vacuum matching (10 to the power -3 - 10 to the power -7 Pa) in the dynamic blend process of high vacuum arc metallic plasma deposition beam and ionic beam, and chemical proportion and activity in the formation proces of multiple element compound. It realizes high quality (Lc not less than 10 to the power -4 gf) high efficiency (deposition rate 10-50 Angstrom/s) dynamic blend new process, and it can be used for multiple element surface ceramic or alloy conversion and material surface modification.
Application Number
申请号
94110150 Application Date
申请日
1994.03.28
Title 名称 Multiple-gun dynamic mixing injection technology and its device
Publication Number
公开号
1109513 Publication Date
公开日
1995.10.04
Approval Pub. Date Granted Pub. Date 2001.01.03
International Classification 分类号 C23C14/48
Applicant(s) Name
申请人
Dalian Polytechnic Univ.
Address 地址 116024
Inventor(s) Name 发明人 Long Zhenhu, Yiu Zhuping
Attorney & Agent 代理人 XIU DEJIN WANG SHUBEN

  
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