Original document(16 pages) Authorized document(16 pages) 中文版
    Title: Vacuum sputtering apparatus
Application Number
申请号
94119300 Application Date
申请日
1994.12.23
Title 名称 Vacuum sputtering apparatus
Publication Number
公开号
1109512 Publication Date
公开日
1995.10.04
Approval Pub. Date Granted Pub. Date 2001.08.22
International Classification 分类号 C23C14/35
Applicant(s) Name
申请人
Matsushita Electric Industria Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Isami Aoyama, Watari Sansai
Attorney & Agent 代理人 HUANG YIWEN

  
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