Original document(20 pages)  中文版
    A liquid medicine supplying equipment with simple structure and high reliability is disclosed. The supplying by-pass channel with valve and the discharging by-pass channel with valve are connected to a flexible pipe which can be elastically expanded and shrinked. The bellow able to be axially and elastically deformed is composed of small belows and big bellows. The non-compressibility medium is sealed in the pump chamber between said flexible pipe and bellows.
Application Number
申请号		 01143833 Application Date
申请日		 2001.12.14
Title 名称 Chemicals feeder
Publication Number
公开号		 1424742 Publication Date
公开日		 2003.06.18
Approval Pub. Date Granted Pub. Date
International Classification 分类号 B05B9/00,G03F7/00,G03F7/16,H01L21/027
Applicant(s) Name
申请人		 K.K. Koganei
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 chen jian

  
Chemical Supply device and method thereof
Flexible tank and a chemical liquid supply apparatus using the same
Flexible tube for supplying chemical liquid
Mask pattern forming method, computer programme product and optical mask production
High dielectric grid laminating structure
Single-step clean method for diffuse and oxidation process
Silicon semiconductor crystal wafers and manufacturing method for multiple semiconductor crystal wafers
Process for silicon low dielectric material curing in furnace
Dry etching process for silicide low dielectric material
Etching process for silicide low dielectric material
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.