Method of producing piezoelectric film with orientation

Original document(8 pages) 中文版

Highly oriented thin films exhibiting good piezoelectric effects are formed in a reaction chamber. This is done by bombarding a target comprising a piezoelectric material. Dislodged particles from the target are ionized and then electrostatically attracted to the surface of a substrate where they are neutralized and deposited in an ordered way.

Application Number 申请号	00121971	Application Date 申请日	2000.07.27
Title 名称	Method of producing piezoelectric film with orientation
Publication Number 公开号	1291825	Publication Date 公开日	2001.04.18
Approval Pub. Date		Granted Pub. Date
International Classification 分类号	H01L41/22;H03H3/00;H03H9/54
Applicant(s) Name 申请人	Lucent Technologies Inc.
Address 地址
Inventor(s) Name 发明人	H.A. Hagins
Attorney & Agent 代理人	luo echuan

Permanent-magnet engine
Magnetic power machine
Pulse width modulation type contravariant device
Current mode DC/DC inverter possessing controllable output impedance
Power control method and circuit and power source device
Magnetically driven magnetic suspension type permanent-magnet electric generator system
Power source device
Thyristor jumper trigger circuit with negative resistance characteristics
Gas insulating switch device
Power source circuit switch

Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.