The multiple-cavity piezoelectric film driven pump is used in micro fluid conveyance and control. It consists of pump body with inlet and outlet passages, piezoelectric vibrator inside the pump cavity and inlet and outlet valves. It features at least two working cavities comprising piezoelectric vibrator and pump body connected serially or parallelly. Owing to that the pump has fluid outputting performance similar to that of several single-cavity piezoelectric pump connected serially or parallelly, the present invention has obviously raised output flow rate and pressure, and when in parallel connection, there is always output fluid in each work period and thus less output fluctuation. |