A silicon sapphire force-sensitive sensor includes titanium alloy stress cup and silicon sapphire foil gauge, welding pads and lead seat assembled on it. The technical key points includes connecting the foil gauge and the stress cup sealed into one integral, and welding the outer lead electrodes to the welding pads by fixing to the lead seat on insulator after real-time measured and carved by the foil gauge thin. The silicon sapphire force-sensitive sensor is produced through the steps of: doping epitaxial thin sheet of silicon sapphire, annealing and oxidizing, etching welding pad window, mask platinum sputtering, slicing; sealing and alloying simultanously, laser cutting, assembling and inspection by testing. The present invention has high production efficiency and low cost, and the product has high quality and measurement precision. |