A punching die for carrier film is chemico-mechanical grinder is composed of a base, a first plate movable between the first and the second positions, and a second plate with multiple punching heads movable between the third and the fourth positions. When the second plate is at the third position, the first plate is at the first position. When the second plate is at the fourth position, the first plate is at the second position for contacting with the said carrier film and punching on it. A maintenance method for punching die is also disclosed for raising efficiency. |