Original document(27 pages)  中文版
    A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear (152) and a second gear (154), which is operatively engaged with the first gear. The linear drive assembly further includes a positioning member (158) having a first portion (160) and a second portion (162). The first portion is movably coupled to the second gear in a linear direction, and the second portion is fixed to a component associated with processing a substrate.
Application Number
申请号		 01805898 Application Date
申请日		 2001.01.02
Title 名称 Linear drive system for use in plasma processing system
Publication Number
公开号		 1429398 Publication Date
公开日		 2003.07.09
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01J37/32
Applicant(s) Name
申请人		 Lam Research Corp.
Address 地址
Inventor(s) Name 发明人 F. Hao;K. Dawson
Attorney & Agent 代理人 cai minjun yang songling
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