| Original document(36 pages) Authorized document(33 pages) 中文版 |
A processing device capable of being maintained easily and reducing a burden on a worker and a method of maintaining the processing device; the processing device, comprising an upper electrode unit (106) forming the ceiling part of a processing chamber (102) of an etching device (100) having a lower assembly (128) on the processing chamber (102) side including upper electrodes (130) and an upper assembly (126) on a power supply side including an electro-body (144); the method of maintaining the processing device, comprising the steps of releasing a lock mechanism (156), solely raising the upper assembly (126) by a lift mechanism (164) for removal, and performing the maintenance of the upper assembly (126) and/or the lower assembly (128), and then locking the lock mechanism (156), raising the upper and lower assemblies (126, 128) integrally with each other by the lift mechanism (164) for removal, and performing the maintenance of the internal parts in the processing chamber (102). |
Application Number
申请号 |
01809509 |
Application Date
申请日 |
2001.05.16 |
| Title 名称 |
Processing device and method of maintaining device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism |
Publication Number
公开号 |
1429404 |
Publication Date
公开日 |
2003.07.09 |
| Approval Pub. Date |
2005.04.27 |
Granted Pub. Date |
2005.04.27 |
| International Classification 分类号 |
H01L21/3065 |
Applicant(s) Name
申请人 |
Tokyo Electron Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Senzaki Shigeru;Sasaki Toshiki;Aoto Tadashi |
| Attorney & Agent 代理人 |
long chun sha cha |
| More information 更 多 信 息 |
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