Original document(24 pages)  中文版
    The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a free radical scavenger polymerization inhibitor.
Application Number
申请号		 02157857 Application Date
申请日		 2002.12.20
Title 名称 Stablizing agent for stopping substituted cyclotetrasiloxane polymerizing
Publication Number
公开号		 1429927 Publication Date
公开日		 2003.07.16
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C07F7/21;C23C16/40;C23C16/448
Applicant(s) Name
申请人		 Air Products and Chemicals Inc.
Address 地址
Inventor(s) Name 发明人 S.G. Majorga;M. Shor;T.R. Gaffney
Attorney & Agent 代理人 tan mengsheng ma chongde
More information 更  多  信  息


 Related patents information
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.