Original document(7 pages) Authorized document(7 pages) 中文版
    The interferometer includes the dual frequency laser, the four beam splitters, the reference lens, the diaphragm, the two polarization beam splitters, the three pyramid prisms and analyzers, the measuring mirror, the reflector and the four photo-detectors. The structures of two Michelsons interferometers are in the optical paths. The wavelengths 1 and 2 from the synthesis wave s. The measurement in sub nano precision is realized by using the s to subdivide the 2. The measurement in nano precision in millimeter range is realized by counting the number of the interference fringe formed by 2. The nano displacement of the measuring mirror is measured by the first and the second photo-detectors. The analyzers and the photo-detectors measure the millimeter displacements of the measuring mirror and the reference mirror.
Application Number
申请号
03115179 Application Date
申请日
2003.01.22
Title 名称 Dual frequency laser synthesized wavelength interferometer
Publication Number
公开号
1431459 Publication Date
公开日
2003.07.23
Approval Pub. Date Granted Pub. Date 2004.11.17
International Classification 分类号 G01B9/02,G01B11/04
Applicant(s) Name
申请人
Zhejiang Engineering College
Address 地址 310033
Inventor(s) Name 发明人 Chen Benyong, Sun Zhengrong
Attorney & Agent 代理人 lin fuyu
More information 更  多  信  息


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