| Original document(32 pages) Authorized document(32 pages) 中文版 |
The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated. |
Application Number
申请号 |
03102740 |
Application Date
申请日 |
2003.01.14 |
| Title 名称 |
Solvent sweeped chemical transporting box |
Publication Number
公开号 |
1432439 |
Publication Date
公开日 |
2003.07.30 |
| Approval Pub. Date |
2006.07.19 |
Granted Pub. Date |
2006.07.19 |
| International Classification 分类号 |
B08B3/08;B08B9/02;H05K3/26;H01L21/00 |
Applicant(s) Name
申请人 |
Air Products and Chemicals, Inc. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
C.M. Bertchel;M. C. Martinds;T. A. Stander |
| Attorney & Agent 代理人 |
zhang shegao |
| More information 更 多 信 息 |
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