Original document(49 pages) Authorized document(46 pages) 中文版
    An apparatus (300) capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate (10) is provided. It includes a rigid member (320) having a top surface of a predetermined shape and a bottom surface. The rigid member (320) contains a plurality of channels (324), each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough. A pad (330) is attached to the rigid member via a fastener. The pad also allows for electrolyte and electric field flow therethrough to the substrate (10).
Application Number
申请号
00819157 Application Date
申请日
2000.11.01
Title 名称 Pad designs and structures for universal material working equipment
Publication Number
公开号
1434882 Publication Date
公开日
2003.08.06
Approval Pub. Date 2005.09.28 Granted Pub. Date 2005.09.28
International Classification 分类号 C25D17/00
Applicant(s) Name
申请人
Nu Tool Inc.
Address 地址
Inventor(s) Name 发明人 Cyprian Uzoh;Bulent Basol;Homayoun Talieh
Attorney & Agent 代理人 fu qiangguo
More information 更  多  信  息


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