Original document(51 pages)  中文版
    This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.
Application Number
申请号		 00819159 Application Date
申请日		 2000.12.22
Title 名称 CAM reference for inspection of multi-color and contour images
Publication Number
公开号		 1434918 Publication Date
公开日		 2003.08.06
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G01N21/95;G01N21/956;G01R31/311
Applicant(s) Name
申请人		 Orbotech Ltd.
Address 地址
Inventor(s) Name 发明人 Zeev Gutman;Tally Gllat-Bernshtein
Attorney & Agent 代理人 wang jingbei
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