Original document(14 pages) Authorized document(15 pages) 中文版
    Method in connection with the production of a template, preferably for nanoimprint lithography, which template comprises a flat plate (1) of a first material and a three-dimensional structure (6, 8) of a second material, arranged on the plate, said second material introductory being applied on said plate, in the method, to form said structure. According to the invention, said second material is thereafter fixed to the plate of said first material, by heat treatment (Q) at at least 150 DEG C, for the production of said template. The invention also relates to a template which has been produced by use of the method.
Application Number
申请号
01809984 Application Date
申请日
2001.04.10
Title 名称 Method in connection with the production of template and the template thus produced
Publication Number
公开号
1434930 Publication Date
公开日
2003.08.06
Approval Pub. Date 2006.01.11 Granted Pub. Date 2006.01.11
International Classification 分类号 G03F7/00;B41M1/06;B81C1/00
Applicant(s) Name
申请人
Obducat AB
Address 地址
Inventor(s) Name 发明人 Babak Heidari
Attorney & Agent 代理人 zhang bengyuan bian xinqin
More information 更  多  信  息


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