| Original document(19 pages) Authorized document(20 pages) 中文版 |
In a manufacturing method for a piezoelectric actuator a first electrode layer is formed on substrate, a ferroelectric thin film is formed on the first electrode layer, and an inorganic protective layer 4 is formed on the ferroelectric thin film. Then, the inorganic protective layer 4 and the ferroelectric thin film are heat-treated under an oxygen containing atmosphere, and a second electrode layer is formed on an oxidation diffusion layer,wherein the oxidation diffusion layer is formed on a surface of the ferroelectric thin film as a result of component diffusion of the ferroelectric thin film and oxidation of the inorganic protective layer 4 due to the heat treatment. By using this method, it is possible to improve ferroelectricity without deterioration or cracking of a surface of the ferroelectric thin film. |
Application Number
申请号 |
03104332 |
Application Date
申请日 |
2003.01.31 |
| Title 名称 |
Strong inductor film element and making method, film capacitor and piezoelectric regulator |
Publication Number
公开号 |
1435878 |
Publication Date
公开日 |
2003.08.13 |
| Approval Pub. Date |
2006.02.01 |
Granted Pub. Date |
2006.02.01 |
| International Classification 分类号 |
H01L21/82;H01L21/31;H01L27/00;H01G4/06;H01G4/33 |
Applicant(s) Name
申请人 |
Matsushita Electric Industrial Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Kita Hiroyuki |
| Attorney & Agent 代理人 |
zhao guohua |
| More information 更 多 信 息 |
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