| Original document(22 pages) 中文版 |
A deposition mask has a configuration in which one or more mask chips, each including a single crystal silicon substrate, are joined to a mask support. Its feature is: the one or more mask chips are joined to respective predetermined positions of the mask support, the orientations of the one or more mask chips are arranged in such a manner that the crystal orientation of the single crystal silicon substrate is aligned in a predetermined direction, and the single crystal silicon substrate of each mask chip has openings. |
Application Number
申请号 |
200410071627 |
Application Date
申请日 |
2004.07.16 |
| Title 名称 |
Deposition mask, manufacturing method thereof, display unit, manufacturing method thereof, and electronic apparatus including display unit
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Publication Number
公开号 |
1578563 |
Publication Date
公开日 |
2005.02.09 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
C09F9/00,C09K11/06,C23C14/04,H01L21/285,H05B33/10,H05B33/12,H05B33/14,H05B33/20 |
Applicant(s) Name
申请人 |
Seiko Epson Corp. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Kuwahara Takayuki |
| Attorney & Agent 代理人 |
li xianglan |
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