A communication chamber (36) defined in a body (28) is supplied with a fluid under pressure through a pipe (38) connected to a supply port (26) defined in the body (28). The fluid under pressure is ejected from the communication chamber (36) through fluid ejection members (32), which are made of a porous material and mounted on an end face of the body (28) by a plate (34), toward a workpiece (18). The workpiece (18) is levitated upwardly and held airborne by the fluid under pressure that is ejected toward the workpiece (18) and the fluid under pressure that flows between the workpiece (18) and the plate (34). |