Original document(59 pages)  中文版
    The invention provides a semiconductor memory capacitor and method for fabricating the same, which enables the area per one capacity element of a semiconductor device, having the capacity element, to be reduced. The capacity element 19 consisting of a lower electrode 16, a capacity insulating film 17 and an upper electrode 18 is provided to be disposed further on a conductive plug 13 provided on a source diffused region 30a of a MOS transistor 30. The film 17 is formed at the bottom of an opening 15a for exposing an oxygen barrier film 14 provided on a second interlayer insulating film 15 and along a wall surface. As a result, a curved part 17a, curved in the penetrating direction of the plug 13, is formed.
Application Number
申请号
03107915 Application Date
申请日
2003.03.24
Title 名称 Semiconductor device and manufacturing method thereof
Publication Number
公开号
1449045 Publication Date
公开日
2003.10.15
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/82;H01L27/10;H01L27/108
Applicant(s) Name
申请人
Matsushita Electric Industrial Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Ito Toyoji;Fujii Eiji
Attorney & Agent 代理人 wang huimin
More information 更  多  信  息


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