Original document(6 pages)  中文版
    The preparation method for nano zinc oxide thin membrane by oxygenating zine sulfide at high temperature. Wherein, preparing the thin membrane with common electron-beam evaporation method in Muffle furnace; whole process is simple, convenient and controllable and can avoid oxygen vacancy and zinc interstice and other defects the product has well performance.
Application Number
申请号
200510027006 Application Date
申请日
2005.06.22
Title 名称 Method for preparing nanometer zinc oxide thin film using high temperature oxidation
Publication Number
公开号
1733973 Publication Date
公开日
2006.02.15
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23C30/00,C23C14/06,C23C14/58,C23C8/10
Applicant(s) Name
申请人
Shanghai Institute of Optics & Precision Mechanics, Chinese Academy of Sciences
Address 地址 201800
Inventor(s) Name 发明人 Wang Sumei, Fu Xiaoyong, Xia Guodong, Shao Jianda
Attorney & Agent 代理人 zhang zechun

  
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