Application Number 申请号 |
200510027006 |
Application Date 申请日 |
2005.06.22 |
| Title 名称 |
Method for preparing nanometer zinc oxide thin film using high temperature oxidation
|
Publication Number 公开号 |
1733973 |
Publication Date 公开日 |
2006.02.15 |
| Approval Pub. Date |
|
Granted Pub. Date |
|
| International Classification 分类号 |
C23C30/00,C23C14/06,C23C14/58,C23C8/10 |
Applicant(s) Name 申请人 |
Shanghai Institute of Optics & Precision Mechanics, Chinese Academy of Sciences |
| Address 地址 |
201800 |
| Inventor(s) Name 发明人 |
Wang Sumei, Fu Xiaoyong, Xia Guodong, Shao Jianda |
| Attorney & Agent 代理人 |
zhang zechun |