| Original document(21 pages) 中文版 |
The invention relates to a vacuum plasma generator (1, 1a, 60), for processing the work-piece inside the vacuum room (17), wherein it comprises: a power supply connector (2) for connecting the voltage supply network; at least one power rectifier (3) connected to at least one first converter (4, 4a) to generate at least one middle circuit voltage; the first radio signal generators (6, 7, 20, 40, 50) connected to at least one middle circuit voltage to generate the first signal with base frequency and first relative position, while said signal is between 1-30MHz; the second radio signal generators (6, 7, 20, 40, 50) connected to the middle circuit voltage to generate the second signal with base frequency and second relative position; at least one 3dB coupler (13, 77-91) for coupling the first and second signals into output signal, and transmitting the output signal to the generator output (14, 92). |
Application Number
申请号 |
200610058962 |
Application Date
申请日 |
2006.03.09 |
| Title 名称 |
Vacuum plasma generator |
Publication Number
公开号 |
1832657 |
Publication Date
公开日 |
2006.09.13 |
| Approval Pub. Date |
|
Granted Pub. Date |
|
| International Classification 分类号 |
H05H1/46 |
Applicant(s) Name
申请人 |
Huettinger Elektronik GmbH & C. |
| Address 地址 |
|
| Inventor(s) Name 发明人 |
Gluck Michael, Hofstetter Christoph |
| Attorney & Agent 代理人 |
wang yang |
| More information 更 多 信 息 |
|
|
|