| Original document(42 pages) 中文版 |
A liquid droplet ejection apparatus includes a liquid droplet ejecting portion that ejects a liquid droplet containing a structure forming material onto a structure forming area defined on a target; and an energy beam radiating portion that radiates an energy beam having a predetermined intensity onto at least a portion of the droplet on the structure forming area. The predetermined intensity is set to a value that permits the droplet on the structure forming area to spread wet on the structure forming area. According to the liquid droplet ejection apparatus, a structure having a precisely controlled shape is obtained. |
Application Number
申请号 |
200610067995 |
Application Date
申请日 |
2006.03.29 |
| Title 名称 |
Liquid droplet ejection apparatus, method for forming structure, and method for manufacturing electro-optic device |
Publication Number
公开号 |
1840242 |
Publication Date
公开日 |
2006.10.04 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
B05C5/02,B05D3/06 |
Applicant(s) Name
申请人 |
Seiko Epson Corp. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
wang huimin |
| More information 更 多 信 息 |
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