Original document(20 pages)  中文版
    An emitter for a liquid metal ion source is provided. The emitter includes a wire comprising a substantially curved portion and a surface wherein at least a portion of the wire surface is tapered at the substantially curved portion to form an emitter tip. Furthermore, a manufacturing method for such an emitter is provided.
Application Number
申请号		 200610099530 Application Date
申请日		 2006.07.26
Title 名称 Emitter for an ion source and method of producing same
Publication Number
公开号		 1909147 Publication Date
公开日		 2007.02.07
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01J27/02;H01J37/08;H01J9/02
Applicant(s) Name
申请人		 Integrated Circuit Testing
Address 地址
Inventor(s) Name 发明人 Pilz Wolfgang;Bischoff Lothar
Attorney & Agent 代理人 zhao fei
More information 更  多  信  息


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