The invention relates to a semi-conductor processing system, which comprises: a vacuum lock, a transmission room, and one or several processing chambers, wherein said transmission room is between the vacuum lock and the processing chamber; the processing chamber is around the transmission room; the transmission room has transmitter. The invention can use the motion of transmitter, without adjusting the vacuum chamber or processing chamber vertically, to install and detach the elements, to reduce the cost and improve the yield. The invention also discloses a relative processing chamber with special ventilate system, to make the processing platforms form reaction gas shield, to avoid the reaction gas interference. |