Original document(39 pages)  中文版
    The invention relates to a semi-conductor element processor, which comprises at least one semi-conductor element processing chamber that contains several semi-conductor element processing platforms; each platform processes one semi-conductor element while it can rotate; the processor also comprises one sealing device to seal the chamber when the platform operates; and the invention has cooling device to confirm the normal operation of sealing element. The invention has independent processing condition when processing several elements to confirm the uniformity.
Application Number
申请号		 200510028563 Application Date
申请日		 2005.08.05
Title 名称 Semiconductor arts piece processing device
Publication Number
公开号		 1909183 Publication Date
公开日		 2007.02.07
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/00;H01L21/68;C23C16/00;C23F1/00
Applicant(s) Name
申请人		 Advanced Micro-Fabrication Equipment (Shanghai) Inc.
Address 地址
Inventor(s) Name 发明人 Chen Aihua;Todaka Ryoji
Attorney & Agent 代理人 wang ji
More information 更  多  信  息


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