Original document(23 pages)  中文版
    The invention relates to a radio match couple network of vacuum reaction room, which comprises: first to n radio sources; each radio source has different frequency, while the frequency from the first to the n radio input port are reduced; the input ports of first radio and the output port form i circuit; the first i circuit has high resistance to the radio sources except the i frequency; when the i circuit is connected to the i frequency radio source, testing from the output port toward to the i circuit, it has the first resistance at the i frequency, and testing reversed, it has the second resistance under the i frequency; said first and second resistances are matched. The invention has low weight, less consumption and reduced cost.
Application Number
申请号
200510028564 Application Date
申请日
2005.08.05
Title 名称 RF matching coupling network for vacuum reaction chamber and its configuration method
Publication Number
公开号
1909184 Publication Date
公开日
2007.02.07
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/00;H03H7/38
Applicant(s) Name
申请人
Advanced Micro-Fabrication Equipment (Shanghai) Inc.
Address 地址
Inventor(s) Name 发明人 Xia Yaomin
Attorney & Agent 代理人 wang ji
More information 更  多  信  息


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