| Original document(23 pages) 中文版 |
The inveniton provides a manufacturing method of actuator equipment and the actuator equipment which can excellently keep a piezo-electric property of piezo-electric material, and can prevent an upper electrode from lifting, and provides a liquid injection head and liquid injection equipment. The manufacturing method comprises a process of forming a diaphragm in a substrate; and process of forming a piezo-electric element consisting of lower electrode, piezo-electric material layer, and the upper electrode in the diaphragm. In the process of forming the piezo-electric element, the upper electrode 30-100(nm) in thickness, 0.3-2.0(GPa) in stress, and 2.0(*10<-7> Omegam) or less in specific resistivity in the condition that temperature is 25-250 DEG C, and that pressure is 0.4-1.5(Pa), is formed by a spattering method on the piezo-electric material layer. |
Application Number
申请号 |
200610109730 |
Application Date
申请日 |
2006.08.09 |
| Title 名称 |
Method for producing actuator device, actuator device, liquid-jet head and liquid-jet apparatus |
Publication Number
公开号 |
1911665 |
Publication Date
公开日 |
2007.02.14 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
B41J2/14;B41J2/045;B41J2/16 |
Applicant(s) Name
申请人 |
Seiko Epson Corp. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Li Xin-shan;Nishiwaki Tsutomu |
| Attorney & Agent 代理人 |
liu chunlei |
| More information 更 多 信 息 |
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