Original document(9 pages)  中文版
    The invention relates to a multiple-thin oxide coating crystal size controlling method. It adjusts the ratio of the crystal grain nucleation temperature holding time and growing temperature holding time to control the film crystal size which is negative correlation with the ratio. The control method can satisfy different demand to make different crystal size. It can design given heat treatment technology route to make multiple-thin oxide coating whose crystal size is accorded with the given electron device structure.
Application Number
申请号		 200510021463 Application Date
申请日		 2005.08.12
Title 名称 Method for controlling large or small of grain of multielement oxide film
Publication Number
公开号		 1912172 Publication Date
公开日		 2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23C14/08;C23C14/58;C23C16/40;C23C16/56;H01L21/324
Applicant(s) Name
申请人		 Electronic Sciences & Technology Univ.
Address 地址
Inventor(s) Name 发明人 Zhang Shuren;Liu Jingsong;Yang Chengtao;Yuan Ying
Attorney & Agent 代理人 liu xun
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