Original document(14 pages)  中文版
    In a vacuum-coating machine (1), the drive unit (6) is mounted compliantly to the chamber housing (3) by means of an elastic intermediate plate (14), such that said drive unit can follow a wobbling motion imposed by the rotary cathode (10), with the support bearing (19) of the free end of the rotary cathode (18) capable of being of a rigid design.
Application Number
申请号		 200610109762 Application Date
申请日		 2006.08.09
Title 名称 Vacuum-coating machine with motor-driven rotary cathode
Publication Number
公开号		 1912175 Publication Date
公开日		 2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23C14/34;H01J37/34
Applicant(s) Name
申请人		 Applied Materials GmbH & Co. KG
Address 地址
Inventor(s) Name 发明人 Sauer Andreas
Attorney & Agent 代理人 wang zhaolin cui hua
More information 更  多  信  息


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