| Original document(18 pages) 中文版 |
A film deposition apparatus capable of improving accuracy for forming a fine pattern is provided. The film deposition apparatus comprises a first nozzle (102a) for discharging first chemical species on a base body (160), a second nozzle (102b) for discharging second chemical species on the base body (160), a material storage chamber (101a) for storing the first chemical species and a reaction-active species generation unit 103a for generating reaction-active species, and a material storage chamber (101b) for storing the second chemical species and a reaction-active species generation unit (103b) for generating the reaction-active species. The first nozzle (102a) and the second nozzle (102b) are installed so that the flow of the discharged first chemical species crosses the flow of the second chemical species. |
Application Number
申请号 |
200610110168 |
Application Date
申请日 |
2006.08.04 |
| Title 名称 |
Apparatus and method for forming a film, patterning method and method for manufacturing an optical device |
Publication Number
公开号 |
1912179 |
Publication Date
公开日 |
2007.02.14 |
| Approval Pub. Date |
|
Granted Pub. Date |
|
| International Classification 分类号 |
C23C16/448;C23C16/52 |
Applicant(s) Name
申请人 |
Seiko Epson Corp. |
| Address 地址 |
|
| Inventor(s) Name 发明人 |
Miyazawa Takashi |
| Attorney & Agent 代理人 |
wang huimin |
| More information 更 多 信 息 |
|
| Related patents information |
Pattern formation method and device, electric sensitive element and colour filter producing method
Mfg. method of laminated membrane, device of using such laminated membrane and its mfg. method
Pixel circuit for light-emitting element
Electronic device, drive mthod for electronic device and electronic instrument
Electronic circuit and driving method electro-optical apparatus and driving method and electronic equipment
Method and apparatus for patterning, method for manufacturing electroluminescent element, and method for manufacturing color filter
Unit circuit, method of controlling unit circuit, electronic device, and electronic apparatus
Electronic circuit and its driving method, electro-optical device and electronic apparatus
Patterning method and apparatus, film forming method and apparatus, electrooptics apparatus, and manufacturing method thereof
Photoelectric conversion element, method for manufacturing photoelectric conversion element, and electronic apparatus
|
|
|