| Original document(22 pages) 中文版 |
A regeneration apparatus for an electroless plating solution of the present invention includes a sensor (20b) for measuring the formation rate of phosphorous acid formed in a plating tank (20) in response to a plating treatment, a split device (21) for taking out a plating solution (100) in the plating tank to transfer the plating solution to a first processing tank (11), a sensor (31) for measuring the concentration of the phosphorous acid contained in the plating solution taken out, an addition device (13) for supplying calcium carbonate or calcium hydroxide (104), an amount of which is required for producing a calcium phosphite (105) from the phosphorous acid contained in the plating solution, to the first processing tank, a separation device (14) for separating and removing the calcium phosphite produced in the first processing tank from the plating solution, a return pump (22) for transferring the plating solution from which the calcium phosphite has been separated and removed to the plating tank, and a controller (10) for controlling the transfer rates of the split device (21) and the return pump (22). |
Application Number
申请号 |
200610101893 |
Application Date
申请日 |
2006.07.12 |
| Title 名称 |
Regeneration apparatus and regeneration method for electroless plating |
Publication Number
公开号 |
1912181 |
Publication Date
公开日 |
2007.02.14 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
C23C18/16 |
Applicant(s) Name
申请人 |
Murata Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Takagami Hidenori;Kawakami Hiroshi;Kato Kazuhiko |
| Attorney & Agent 代理人 |
sha cha |
| More information 更 多 信 息 |
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