Original document(29 pages)  中文版
    The invention provides an etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid, nitric acid, acetic acid, water and an additive, wherein the additive includes a chlorine-based compound, a nitrate-based compound, a sulfate-based compound and an oxidation regulator. In addition, the flat panel display device may be manufactured by patterning a gate electrode, source/drain electrodes and a pixel electrode using the same etchant composition. The gate electrode, source/drain electrodes and the pixel electrode may be formed of different conductive materials. Accordingly, processes are simplified so that manufacturing costs may be reduced and productivity may be improved.
Application Number
申请号
200610090316 Application Date
申请日
2006.06.29
Title 名称 Etchant composition, methods of patterning conductive layer and manufacturing flat panel display device using the same
Publication Number
公开号
1912187 Publication Date
公开日
2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23F1/16;H01L21/306
Applicant(s) Name
申请人
LG Philips LCD Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Lee Kyoung M.;Song Kye C.;Cho Sam-sung;Shin Hyon-chu;Kim Nan-suh
Attorney & Agent 代理人 xu jinguo qi jianguo
More information 更  多  信  息


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