| Original document(55 pages) 中文版 |
This invention discloses a mounting/demounting device for a semiconductor technical unit and a method, in which, a process platform rises to hold a semiconductor technical unit to keep it at the original position and does not rise or fall it along the thumbstall when the unit is mounted or demounted so as to secure that the unit can be located at the process platform accurately. |
Application Number
申请号 |
200510028667 |
Application Date
申请日 |
2005.08.11 |
| Title 名称 |
Loading umloading device of semiconductor processing piece and its loading and unloading method |
Publication Number
公开号 |
1913098 |
Publication Date
公开日 |
2007.02.14 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
H01L21/00;H01L21/68;B65G49/07;C23C16/00;C23F1/00 |
Applicant(s) Name
申请人 |
Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Todaka Ryoji |
| Attorney & Agent 代理人 |
wang ji |
| More information 更 多 信 息 |
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