Original document(8 pages)  中文版
    This invention provides a manufacture technology for passing through isolation regions and PN junctions of semiconductor chips, first of all, corroding the double sides of a chip symmetrically with etching and chemical corrosion to make grooves in the region for making PN junction passing through isolation and diffusion, then passing through the isolation region to finish impurity diffusion with the base synchronously to finish passing through the isolation region and forming base a PN junction, which reduces the diffusion temperature and time.
Application Number
申请号
200610068443 Application Date
申请日
2006.08.28
Title 名称 Manufacturing process of semiconductor device chip punch through isolation area and PN junction
Publication Number
公开号
1913130 Publication Date
公开日
2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/822
Applicant(s) Name
申请人
Tang Qingmin
Address 地址
Inventor(s) Name 发明人 Tang Qingmin
Attorney & Agent 代理人
More information 更  多  信  息


 Related patents information
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.