Original document(14 pages)  中文版
    Provided is a CMOS (complementary metal oxide semiconductor) image sensor and a manufacturing method therof, In the method, a photodiode, an interlayer insulating layer, a color filter layer, and a planarizing layer are sequentially formed on a substrate. A photoresist is applied on the planarizing layer. The photoresist is selectively patterned to form a plurality of photoresist patterns. A surface of each photoresist pattern is hardened. The hardened photoresist patterns are reflowed to form microlenses.
Application Number
申请号
200610109759 Application Date
申请日
2006.08.09
Title 名称 CMOS image sensor and manufacturing method thereof
Publication Number
公开号
1913131 Publication Date
公开日
2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/822;H01L27/146
Applicant(s) Name
申请人
Dongbu Electronics Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Kim Yeong S.
Attorney & Agent 代理人 yu gang
More information 更  多  信  息


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