Original document(11 pages)  中文版
    This invention relates to an AlGaN base resonance enhanced monocolor ultraviolet detector structure including: setting low and high temperature GaN materials with the thickness of 50-2000nm on a sapphire substrate, setting AlN/AlGaN multilayer structured distributed Bragg reflectors of 15-80nm and 15-100nm of 5-50 periods on the GaN material as the base lenses, setting a resonance cavity of n-AlxGal-xN/i-GaN/p-AlxGl-xN structure on the lenses, namely, setting high temperature absorption layers of n-AlzGal-xN and i-GaN of 20-80nm and 5-30nm thick and a resonator of 20-80nm thick and high temperature p-AlxGal-xN, Al composition and x is greater than or equal to 0.3, finally finishing RCE ultraviolet detector structure by a reflector, a top lens of AlN/AlGaN multi-layer structure distributed Bragg structure reflectors in the thickness of 15-89nm and 15-100nm from 0-30 periods.
Application Number
申请号
200610086105 Application Date
申请日
2006.08.29
Title 名称 AlGaN base resonant reinforced one-color UV detector structure and growing method
Publication Number
公开号
1913178 Publication Date
公开日
2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L31/105;H01L31/18
Applicant(s) Name
申请人
Nanjing Univ.
Address 地址
Inventor(s) Name 发明人 Xie Zili;Jiang Ruolian;Zhang Rong;Han Ping;Xiu Xiangqian;Liu Bin;Li Liang;Zhang Hong;Zheng Youdou;Gu Shulin;Shi Yi;Zhu Shunming;Hu Liqun
Attorney & Agent 代理人 tang zhiwu wang pengxiang
More information 更  多  信  息


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