Original document(21 pages)  中文版
    Provided is a turntable device for spin-coating a substrate having a central hole formed in the central portion thereof with an external coating material due to a centrifugal force by rotating the substrate. The turntable device includes: a support unit having a flat surface that has at least one vacuum hole which supply vacuum force to the substrate for fixedly supporting the substrate on the horizontal surface; an elastic body disposed at the center of the support unit to be inserted into the central hole of the substrate that is fixedly supported on the surface of the support unit, and closing the central hole by being elastically deformed due to an external force; and a pressing member disposed on the elastic body and pressing the elastic body to deform the elastic body elastically. Since an additional element for closing the central hole of the substrate during spin-coating is not required, the apparatus is simple, the coating process is simple, and the central portion of the substrate is prevented from being contaminated after the spin-coating.
Application Number
申请号
200580003554 Application Date
申请日
2005.09.08
Title 名称 Turnable device for spin-coating
Publication Number
公开号
1914676 Publication Date
公开日
2007.02.14
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G11B7/26
Applicant(s) Name
申请人
LG Chemical Ltd.
Address 地址
Inventor(s) Name 发明人 Kang Tae-sik;Lee Seong-keun;Hong Young-jun
Attorney & Agent 代理人 zhu mei xu zhimeng
More information 更  多  信  息


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