Original document(93 pages)  中文版
    An adhesive sheet comprising a pressure-sensitive adhesive layer and a substrate layer, wherein the strength of adhesion between the pressure-sensitive adhesive layer and the substrate layer is controlled by means of irradiation with a radiation and the pressure-sensitive adhesive layer comprises the following ingredients: (a) a thermoplastic resin, (b) a heat-polymerizable ingredient, and (c) a compound which generates a base upon irradiation with the radiation. The adhesive sheet satisfies the following inconsistent requirements: it should have tackiness sufficient to keep semiconductor elements held thereon during dicing and, upon subsequent irradiation with a radiation for regulating the strength of adhesion between the pressure-sensitive adhesive layer and the substrate, come to have such low tackiness that it does not damage the elements during pickup.
Application Number
申请号
200610100287 Application Date
申请日
2002.08.27
Title 名称 Adhesive sheet and semiconductor device and process for producing the same
Publication Number
公开号
1916097 Publication Date
公开日
2007.02.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C09J7/02;H01L21/58
Applicant(s) Name
申请人
Hitachi Chemical Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Kawakami Hiroyuki;Inada Teiichi;Masuko Takashi;Ookubo Keisuke;Hatakeyama Keiichi;Yanagawa Toshiyuki;Katogi Shigeki
Attorney & Agent 代理人 luo chundan
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