Original document(8 pages)  中文版
    This is a modified SU8 electric heat micro performer for multi arc straight line thrusting device, and it belongs to the MEMS micro manufacturing techniques. Comprised of the SU8 cantilever beam, the left conductive layer connected to the outside circuit, and the right conductive layer, its SU8 cantilever beam is multi arc structured for straight line trusting, made on the glass base and the beam is made of the SU8 glue blended with nanometer carbon tube, and the top of the SU8 glue cantilever beam of the left and right conductive layers connect with the glass base through the left conductive layer and the right conductive layer in the below. This cantilever structure is highly increased in mechanical intensity and conductivity and it is beneficial to reduce the operating current and operating temperature.
Application Number
申请号
200610116292 Application Date
申请日
2006.09.21
Title 名称 Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion
Publication Number
公开号
1923670 Publication Date
公开日
2007.03.07
Approval Pub. Date Granted Pub. Date
International Classification 分类号 B81B3/00
Applicant(s) Name
申请人
Shanghai Jiao Tong University
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 wangti lin zhangzong meng
More information 更  多  信  息


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