| Original document(11 pages) 中文版 |
The related projection optical system for photo-etching device comprises six lens groups, from objective to the image; wherein, the first/third/fourth/sixth lens group has positive focal power. This invention includes 23 optical lenses without aspheric lens for full-refraction, can reduce cost and processing difficulty efficiently, and also works well for larger distance from the object to image. |
Application Number
申请号 |
200610116546 |
Application Date
申请日 |
2006.09.27 |
| Title 名称 |
Projection optical system |
Publication Number
公开号 |
1928610 |
Publication Date
公开日 |
2007.03.14 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
G02B9/62 |
Applicant(s) Name
申请人 |
Shanghai Micro Electronics Equipment Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
wangji |
| More information 更 多 信 息 |
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