The invention is concerned with the drying equipment and the method for semiconductor equipment, the drying equipment includes: the extracting equipment, the pipeline, the liquid switch, the current switch, and the controlling equipment, the extracting equipment and the pipeline connect with the semiconductor equipment, sets the liquid switch on the pipeline, the controlling equipment electronic control the liquid switch by the current switch. A liquid enters the semiconductor equipment by the extracting equipment when the liquid switch is starting. The invention can achieve the drying operation and reach the expecting press of the reaction chamber in a short time by the switch time of the start and close of the liquid switch. |