| Original document(7 pages) 中文版 |
The invention is concerned with the metal bulgy point manufacture method that provides smoother surface, which uses the two galvanization craft steps with different current density to replace the traditional steps that is one galvanization craft step with one current density, it is: the first galvanization is using low current density to deposit a galvanization gold layer under the bulgy point metal layer (UBM) in order to fill the metal layer using low current density galvanization that is at the central part of the UBM layer fovea; processes the second galvanization by the high current density to form the metal protecting layer on the top of the metal bulgy point, thereby to form the smoother metal bulgy point surface structure. |
Application Number 申请号 |
200510029564 |
Application Date 申请日 |
2005.09.12 |
| Title 名称 |
Method for producing surface more smooth golden convex points |
Publication Number 公开号 |
1933106 |
Publication Date 公开日 |
2007.03.21 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
H01L21/283 |
Applicant(s) Name 申请人 |
Zhongxin International Integrated Circuit Manufacturing (Shanghai) Co., Ltd. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
louxian yang |
| More information 更 多 信 息 |
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