Original document(12 pages)  中文版
    This invention relates to a trailing integrated micro-lens infrared focal plane detector and a preparation method for micro-lenses, in which, said detector includes: infrared photosensitive meta-array chips, a read-out circuit, a blending mutual-connected indium post and a micro-lens array, which is processed by micro-mechanism at the back of the substrate of the array chip applying an etching method to the positive pattern of a memory focal plane detection chip and a plasma combined etching technology, and the optical shafts of the trailing integrated micro-lens are coincident with the photosensitive face central normal of the corresponding photosensitive pixels.
Application Number
申请号
200610117106 Application Date
申请日
2006.10.13
Title 名称 Backward integrated micro-lens infrared focal plane detector and micro-lens producing method
Publication Number
公开号
1933149 Publication Date
公开日
2007.03.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L25/00;H01L25/18;H01L27/14;H01L21/00;G01J1/42;G02B3/00
Applicant(s) Name
申请人
Shanghai Inst. of Technical Physics
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 tianshen rong
More information 更  多  信  息


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