Original document(32 pages)  中文版
    A nonvolatile semiconductor memory device includes a plurality of pillars protruding upward from a semiconductor substrate and having respective top surfaces and opposing sidewalls, a bit line on the top surfaces of the pillars and connecting a row of the pillars along a first direction, a pair of word lines on the opposing sidewalls of one of the plurality of pillars and crossing beneath the bit line, and a pair of memory layers interposed between respective ones of the pair of word lines and the one of the plurality of pillars. Methods of fabricating a nonvolatile semiconductor memory device include selectively etching a semiconductor substrate to form pluralities of stripes having opposing sidewalls and being arranged along a direction, forming memory layers and word lines along the sidewalls of the stripes selectively etching the stripes to form a plurality of pillars, and forming a bit line connecting the pillars and crossing above the word lines.
Application Number
申请号
200610153746 Application Date
申请日
2006.09.15
Title 名称 Nonvolatile semiconductor memory devices and methods of forming the same
Publication Number
公开号
1933163 Publication Date
公开日
2007.03.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L27/115;H01L23/522;H01L21/8247;H01L21/768;G11C16/04;G11C11/56
Applicant(s) Name
申请人
Samsung Electronics Co., Ltd.
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 linyu qing xieli na
More information 更  多  信  息


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